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Large area deep ultraviolet light of Al$_{0.47}$Ga$_{0.53}$N/Al$_{0.56}$Ga$_{0.44}$N multi quantum well with carbon nanotube electron beam pumping

Yoo, Sung Tae; So, Byeongchan ORCID iD icon; Lee, Hye In; Nam, Okhyun; Chang Park, Kyu

Abstract:

Large area deep ultraviolet (DUV) light is generated by carbon nanotube (CNT) cold cathode electron beam (C-beam) irradiation on Al$_{0.47}$Ga$_{0.53}$N/Al$_{0.56}$Ga$_{0.44}$N multi quantum wells (MQWs) anode. We developed areal electron beam (EB) with CNT cold cathode emitters. The CNT emitters on silicon wafer were deposited with an area of 188 mm$^2$ , and these were vertically aligned and had conical structures. We optimized the C-beam irradiation conditions to effectively excite AlGaN MQWs. When AlGaN MQWs were excited using an anode voltage of 3 kV and an anode current of 0.8 mA, DUV with a wavelength of 278.7 nm was generated in a large area of 303 mm$^2$ . This DUV area is more than 11 times larger than the light emitting area of conventional EB pumped light sources and UV-LEDs.


Verlagsausgabe §
DOI: 10.5445/IR/1000142904
Veröffentlicht am 09.02.2022
Originalveröffentlichung
DOI: 10.1063/1.5109956
Scopus
Zitationen: 13
Web of Science
Zitationen: 13
Dimensions
Zitationen: 11
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Photonenforschung und Synchrotronstrahlung (IPS)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 07.2019
Sprache Englisch
Identifikator ISSN: 2158-3226
KITopen-ID: 1000142904
Erschienen in AIP Advances
Verlag American Institute of Physics (AIP)
Band 9
Heft 7
Seiten Art.-Nr.: 075104
Nachgewiesen in Dimensions
Web of Science
Scopus
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