4M/ICOMM 2009 : the Global Conference on Micro Manufacture ; incorporating the 5th International Conference on Multi-Material Micro Manufacture (4M) and the 4th International Conference on Micro Manufacturing (ICOMM) ; 23rd - 25th September 2009, Forschungszentrum Karlsruhe, Karlsruhe, Germany ; [proceedings] / organized by the 4M and ICOMM associations