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Analysis of Superconducting Thin Films in a Modern FIB/SEM Dual-Beam Instrument

Grünewald, Lukas ORCID iD icon 1; Nerz, Daniel 1; Langer, Marco 2; Meyer, Sven 2; Beisig, Nico 2; Cayado, Pablo 2; Hänisch, Jens ORCID iD icon 2; Holzapfel, Bernhard ORCID iD icon 2; Gerthsen, Dagmar 1
1 Laboratorium für Elektronenmikroskopie (LEM), Karlsruher Institut für Technologie (KIT)
2 Institut für Technische Physik (ITEP), Karlsruher Institut für Technologie (KIT)

Abstract (englisch):

Thin-film technology is used in many applications and often requires structural and chemical analyses on the nanoscale. (Scanning) transmission electron microscopy ((S)TEM) in a dedicated (S)TEM instrument is a powerful analysis tool for this purpose. However, the TEM sample preparation and consecutive (S)TEM measurement in different instruments limit high-throughput analysis. Modern combined focused-ion-beam (FIB)/SEM systems are routinely used for TEM sample preparation and can be equipped with a STEM- (for STEM-in-SEM imaging), energy-dispersive x-ray spectroscopy- (EDXS), and other detectors, resulting in a large versatility for material analysis.
In this work, we demonstrate how correlative SEM, EDXS, and STEM-in-SEM in a Thermo Scientific Helios G4 FX FIB/SEM instrument, equipped with a dedicated STEM holder and a Bruker XFlash 6|60 EDXS system, can be used for sample preparation and structural and chemical characterization within one instrument. We have investigated Ba(Fe0.92Co0.08)2As2 (Ba122) and REBa2Cu3O7δ (REBCO, RE: rare earth, e.g. Gd) thin films grown by pulsed laser deposition on different substrates.

Zugehörige Institution(en) am KIT Institut für Technische Physik (ITEP)
Laboratorium für Elektronenmikroskopie (LEM)
Publikationstyp Poster
Publikationsdatum 25.08.2021
Sprache Englisch
Identifikator KITopen-ID: 1000147936
HGF-Programm 38.05.03 (POF IV, LK 01) High Temperature Superconductivity
Veranstaltung Microscopy Conference (MC 2021), Online, 22.08.2021 – 26.08.2021
Schlagwörter REBCO, GdBCO, STEM-in-SEM, EDXS, Thin film, FIB/SEM, PLD
Relationen in KITopen

Volltext §
DOI: 10.5445/IR/1000147936
Veröffentlicht am 21.06.2022
Seitenaufrufe: 143
seit 21.06.2022
Downloads: 88
seit 21.06.2022
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