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Observer design for a nonlinear heat equation: Application to semiconductor wafer processing

Schaum, Alexander; Koch, Stefan ; Kleindienst, Martin; Reichhartinger, Markus; Meurer, Thomas ORCID iD icon; Moreno, Jaime A.; Horn, Martin

Abstract:

In this paper, the problem of observer design for a class of 1D nonlinear heat equations with pointwise in-domain temperature measurements is addressed. A pointwise measurement injection observer is designed and the robust convergence of its estimation error in presence of bounded distributed perturbations is established by verifying input-to-state stability. The obtained convergence conditions express the underlying interplay between heat conduction and radiation and include specific dependencies on the sensor locations which are the main degrees of freedom in the design approach. The theoretical results are experimentally validated on a semiconductor wafer processing unit.


Verlagsausgabe §
DOI: 10.5445/IR/1000156744
Veröffentlicht am 10.03.2023
Originalveröffentlichung
DOI: 10.1016/j.jprocont.2022.09.004
Scopus
Zitationen: 3
Web of Science
Zitationen: 2
Dimensions
Zitationen: 3
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mechanische Verfahrenstechnik und Mechanik (MVM)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 11.2022
Sprache Englisch
Identifikator ISSN: 0959-1524, 1873-2771
KITopen-ID: 1000156744
Erschienen in Journal of Process Control
Verlag Elsevier
Band 119
Seiten 34–43
Vorab online veröffentlicht am 05.10.2022
Schlagwörter Nonlinear heat equation, Pointwise measurement injection observer, Input-to-state stability, Wafer processing
Nachgewiesen in Web of Science
Dimensions
Scopus
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