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Shell effects and free-electrons in electromigrated oxidized Cu-nanocontacts

Hauser, Julia 1; Rothhardt, Daniel; Pfender-Siedle, Robert 1; Hoffmann-Vogel, Regina 1
1 Physikalisches Institut (PHI), Karlsruher Institut für Technologie (KIT)

Abstract:

Electromigration in interconnects continues to be an important field of study in integrated circuits as the interconnects are planned to shrink in size at comparable pace as the semiconductor functional elements. Through shrinking the interconnects approach the regime where quantum size effects become important. The observation of quantum size and shell effects is usually restricted either to low-temperatures or vacuum conditions or to chemically inert materials such as Au. Here, we show that in electromigrated Cu nanocontacts such effects can be observed at room temperature and room pressure even in the presence of oxidation. Our data provide evidence that the nanocontacts are nearly spherical objects with a triangular-cylindrical symmetry of their electronic wave functions with a stronger free-electron-like character compared to previous results. We do not observe a detrimental effect of oxygen. The presence of shell effects has implications for the technological use of Cu nanocontacts as interconnects in integrated circuits and could lead to the use of electronic wave functions of shells in such interconnects.


Verlagsausgabe §
DOI: 10.5445/IR/1000160444
Veröffentlicht am 12.07.2023
Cover der Publikation
Zugehörige Institution(en) am KIT Physikalisches Institut (PHI)
Publikationstyp Zeitschriftenaufsatz
Publikationsdatum 23.04.2023
Sprache Englisch
Identifikator ISSN: 0957-4484, 1361-6528
KITopen-ID: 1000160444
Erschienen in Nanotechnology
Verlag Institute of Physics Publishing Ltd (IOP Publishing Ltd)
Band 34
Heft 17
Seiten Art.-Nr.: 175703
Vorab online veröffentlicht am 13.02.2023
Nachgewiesen in Web of Science
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