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Sub‐Micron Replication of Fused Silica Glass and Amorphous Metals for Tool‐Based Manufacturing

Kluck, Sebastian; Prediger, Richard; Hambitzer, Leonhard; Nekoonam, Niloofar; Dreher, Franziska; Luitz, Manuel; Lunzer, Markus; Worgull, Matthias 1; Schneider, Marc 1; Rapp, Bastian E.; Kotz-Helmer, Frederik
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)

Abstract:

The growing importance of submicrometer-structured surfaces across a
variety of different fields has driven progress in light manipulation, color
diversity, water-repellency, and functional enhancements. To enable mass
production, processes like hot-embossing (HE), roll-to-roll replication (R2R),
and injection molding (IM) are essential due to their precision and material
flexibility. However, these processes are tool-based manufacturing (TBM)
techniques requiring metal molds, which are time-consuming and expensive
to manufacture, as they mostly rely on galvanoforming using templates made
via precision microlithography or two-photon-polymerization (2PP). In this
work, a novel approach is demonstrated to replicate amorphous metals from
fused silica glass, derived from additive manufacturing and structured using
hot embossing and casting, enabling the fabrication of metal insets with
features in the range of 300 nm and a surface roughness of below 10 nm. By
partially crystallizing the amorphous metal, during the replication process, the
insets gain a high hardness of up to 800 HV. The metal molds are successfully
used in polymer injection molding using different polymers including
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Verlagsausgabe §
DOI: 10.5445/IR/1000172808
Veröffentlicht am 25.07.2024
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2024
Sprache Englisch
Identifikator ISSN: 2198-3844
KITopen-ID: 1000172808
Erschienen in Advanced Science
Verlag Wiley Open Access
Seiten Art.-Nr.: 2405320
Vorab online veröffentlicht am 12.07.2024
Nachgewiesen in Scopus
Web of Science
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