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Enhanced crack stability in micro scale fracture testing via optimized bridge notches

Okotete, Eloho ORCID iD icon 1; Muslija, Alban 2,3; Hohmann, Judith K. ORCID iD icon 2,3; Kohl, Manfred 2,3; Brinckmann, Steffen; Lee, Subin ORCID iD icon 1; Kirchlechner, Christoph 1
1 Institut für Angewandte Materialien – Werkstoff- und Grenzflächenmechanik (IAM-MMI), Karlsruher Institut für Technologie (KIT)
2 Karlsruhe Nano Micro Facility (KNMF), Karlsruher Institut für Technologie (KIT)
3 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)

Abstract (englisch):

In micro cantilever fracture, a bridge notch geometry with material ligaments at the notch ends helps to reduce
focused ion beam artefacts near the notch root by arresting initial cracks and promoting fracture from sharp,
natural cracks. Thus, it significantly reduces the statistical scatter in fracture toughness, a common but undesirable feature in micro fracture testing. Although this concept has been validated in simulations and experiments, systematic investigations into the optimal geometry remain lacking. In this study, we experimentally examine the influence of bridge width and notch depth on the fracture toughness of micro cantilevers, using single crystalline silicon as a model material. We found that samples with thinner material bridges and deeper notches exhibit crack arrest before failure, while those with thicker bridges do not show crack arrest instead exhibit apparent toughening. Cantilevers with an optimized bridge notch geometry for crack arrest exhibit a KIC of 1.09 ± 0.02 MPa m0.5, which agrees with previously reported fracture toughness for the Si (111) surface. Additionally, discrepancies between the bridge geometry in the experiment and the ideal structure resulted in a mismatch between the predicted and observed notch requirements for crack arrest. ... mehr


Verlagsausgabe §
DOI: 10.5445/IR/1000181897
Veröffentlicht am 21.05.2025
Originalveröffentlichung
DOI: 10.1016/j.msea.2025.148479
Scopus
Zitationen: 4
Web of Science
Zitationen: 4
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Zitationen: 4
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Karlsruhe Nano Micro Facility (KNMF)
Institut für Angewandte Materialien – Werkstoff- und Grenzflächenmechanik (IAM-MMI)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 09.2025
Sprache Englisch
Identifikator ISSN: 0921-5093
KITopen-ID: 1000181897
HGF-Programm 43.31.01 (POF IV, LK 01) Multifunctionality Molecular Design & Material Architecture
Erschienen in Materials Science and Engineering: A
Verlag Elsevier
Band 939
Seiten Art.-Nr.: 148479
Vorab online veröffentlicht am 09.05.2025
Schlagwörter Bridge notch, Notch geometry, Micro cantilever, Fracture toughness, FIB artefact, Silicon
Nachgewiesen in OpenAlex
Web of Science
Dimensions
Scopus
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