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Coil voltage and current waveforms during ignition of a 10Pa Xe inductive discharge using two frequencies for excitation

Dycke, Jan ORCID iD icon 1
1 Lichttechnisches Institut (LTI), Karlsruher Institut für Technologie (KIT)

Abstract:

Der Datensatz enthält die Oszilloskoprohdaten über den zeitlichen Verlauf der Spannung über und des Stroms durch eine Spule, die zum Anregen eines induktiv gekoppelten Plasmas verwendet wird. Anregung erfolgt mittels zweier überlagerter Frequenzen im Strom, wobei die erste bei ca. 2,5 MHz und die zweite bei ca. 7,5 MHz liegt. Der Strom- und Spannungsverlauf während der Zündung des Plasmas wurde aufgezeichnet. Bei verschiedenen Amplitudenverhältnissen zwischen 0 und 1 wurden jeweils 50 bis 60 Zündungen aufgenommen. Ebenso wird für diese Amplitudenverhältnisse der Punkt der minimalen Leistungseinkopplung eingestellt, der gerade noch die Aufrechterhaltung der induktiven Entladung gewährleistet. ... mehr

Abstract (englisch):

The dataset contains the raw oscilloscope time-domain data of the voltage across and current through a coil used to excite an inductively coupled plasma. Excitation is carried out by means of two superimposed frequencies in the current, the first being about 2.5 MHz and the second about 7.5 MHz. The current and voltage curves during the plasma ignition were recorded. At different amplitude ratios between 0 and 1, 50 to 60 ignitions were recorded in each case. Likewise, the point of minimum power maintaining the discharge is set for these amplitude ratios. At this point, the voltage over and current through the coil were also recorded over time.


Zugehörige Institution(en) am KIT Lichttechnisches Institut (LTI)
Publikationstyp Forschungsdaten
Publikationsdatum 17.11.2025
Erstellungsdatum 25.09.2024 - 07.11.2025
Identifikator DOI: 10.35097/z1nsc9cc619dfe58
KITopen-ID: 1000186604
Lizenz Creative Commons Namensnennung – Keine Bearbeitungen 4.0 International
Schlagwörter Dual-frequency plasma, inductively coupled plasma, plasma ignition
Liesmich

The data is organized in to folders according to the set amplitude ratio of the two excitation currents. Where for example "A01" corresponds to an amplitude ratio of 10%. For most of the tuningpoints there exists a MSP measurement in an additional folder with the "_msp" suffix for the corresponding folder name. The data in those folder contains all the different channels of the ozilloscope. Regular ignition captures follow the naming:
"SaveOnEvent_chX_TIMESTAMP.wfm"
Where X is the number of the oszilloscope channel, and TIMESTAMP is the date and time the data was measured in the format: year month day hour minute second milliseconds.
Channel 1 contains the voltage across the coil.
Channel 2 contains the current through the coil.
Channel 3 contains the drain source voltage across low voltage side of the driving inverter.
Channel 4 contains the dc supply voltage.
Channel 5 contains the voltage signal of the photo diode used to trigger the measurements.
Additionally, each folder also contains a measurement labled "leer_chX.wfm". Those contain the no load (plasma off) measurement to reference the signals for a impedance analysis.
All the data is in the "wfm" format of a MSO5 Tektronics oszilloscope, to read the data use the added matlab fuction "simp_wfm_read.m".
The csv file cotains the result of an impedance measurement of the excitation coil in the setup. This file in conjuction with the "leer_chX.wfm" files in each folder allows for amplitude and phase correction of the measurement signals.

Art der Forschungsdaten Dataset
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