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Preserving the Crystal Structure of Organic Semiconductors During Cross-Sectional Specimen Preparation for Transmission Electron Microscopy Using a Focused Ion Beam

Hettler, Simon ORCID iD icon 1; Zschieschang, Ute; Klauk, Hagen; Peterlechner, Martin 1; Eggeler, Yolita M. ORCID iD icon 1
1 Laboratorium für Elektronenmikroskopie (LEM), Karlsruher Institut für Technologie (KIT)

Abstract:

Transmission electron microscopy (TEM) analyses of cross-sectional lamellae prepared by a -focused ion beam are frequently applied in a variety of scientific disciplines where high-resolution information is required from a specific site of interest. Radiation-sensitive materials thereby require dedicated methods to facilitate an analysis of the specimen in its pristine state. Here, we present a method for preparing TEM lamellae of organic thin-film transistors that preserves morphology and crystal structure of beam-sensitive small-molecule organic semiconductor thin films as demonstrated for pentacene, dinaphtho[2,3-b:2⁠,3-f]thieno[3,2-b]thiophene (DNTT), and phenylalkyl-substituted 3,4,9,10-benzo[de]isoquinolino[1,8-gh]-quinolinetetra-carboxylic diimide (PhC2-BQQDI). The two key measures are minimizing electron and ion irradiation of the organic layer using protective layers and optimized beam conditions, and performing the final lamella thinning at reduced temperature. Monte-Carlo simulations can help to find the optimum beam settings, but channeling of electrons and ions, typically not considered in the simulations, can lead to an increased penetration depth and needs to be taken into account. ... mehr


Preprint §
DOI: 10.5445/IR/1000196254
Veröffentlicht am 17.08.2026
Originalveröffentlichung
DOI: 10.1093/mam/ozag090
Cover der Publikation
Zugehörige Institution(en) am KIT Laboratorium für Elektronenmikroskopie (LEM)
Publikationstyp Zeitschriftenaufsatz
Publikationsdatum 01.07.2026
Sprache Englisch
Identifikator ISSN: 1431-9276, 1435-8115
KITopen-ID: 1000196254
Erschienen in Microscopy and Microanalysis
Verlag Cambridge University Press (CUP)
Band 32
Heft 4
Schlagwörter beam damage, beam-sensitive materials, focused ion beam, molecular crystals, organic semiconductor, transmission electron microscopy
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