Fast timing and TCT measurement results of CNM double-sided 3D sensors

Sensors with fast timing capabilities (on the order of tens of picoseconds) are a critical component of future HEP tracking detectors, providing the ability to disentangle high multiplicity events. Silicon 3D sensors are capable of delivering this temporal resolution and additionally display an excellent radiation hardness, suitable for the harsh environments expected in future hadron colliders (e.g. FCC-hh). In the course of the RD50 project “3D detectors optimized for timing applications”, double-sided 3D sensors with two different column layouts, hexagonal and orthogonal, and different column counts were designed and produced by CNM. In this study, results of IV, top-TCT and source timing measurements of unirradiated as well as proton irradiated sensor structures are presented. The IV characterisation shows a strong decrease of the overall high leakage current of the sensors after irradiation. Top-TCT measurements with both an infrared and red laser reveal a mostly homogenous charge collection in the sensor bulk, while higher signals are observed in the outermost columns for surface charge injection. The time resolution of sensors irradiated up to a 1 MeV neutron equivalent fluence of 3 × 10$^{15}$ cm$^{-2}$ reaches down to ca. ... mehr65 ps, showing only a slight degradation compared to unirradiated sensors.