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Structural parameters of multilayers from X-ray reflectivity: an easy-to-handle approach

Manciu, M.; Dudas, L.; Sürgers, Christoph; Manaila, R.

Abstract:
An analytical approximation was derived for the calculation of the grazing-incidence X-ray reflectivity pattern in a defect-free multilayer. The approximation is valid in the low-reflectivity {\it {$\theta$}} ranges. For {\it k} = (4{\it {$\pi$}}sin {\it {$\theta$}})/{$\lambda$} > 0.28{\AA}${\sp {$-$}1}$ ({\it {$\theta$}} > 2{$^\circ$} with Cu {\it K{$\alpha$}} radiation), the formula deviates by at most 1% from the rigorous matricial approach in the case of most metallic multilayers. The main advantage of the approximation is that it allows the identification of features in the reflectance pattern, from which desired structural parameters (average layer thicknesses, external and internal roughness) can be estimated easily. This approach yields average structural parameters, best approximating those of a real multilayer but ignoring possible defects.


Zugehörige Institution(en) am KIT Physikalisches Institut (PHI)
Publikationstyp Zeitschriftenaufsatz
Jahr 1996
Sprache Englisch
Identifikator ISSN: 0021-8898
KITopen ID: 192696
Erschienen in Journal of applied crystallography
Band 28
Heft 2
Seiten 160-167
Bemerkung zur Veröffentlichung Sonderdrucknummer 97S117
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