Integrated measuring system for the thermal characterization of gas flows in MEMS under slip-flow regime
| Zugehörige Institution(en) am KIT | Institut für Mikroverfahrenstechnik (IMVT) |
| Publikationstyp | Vortrag |
| Publikationsjahr | 2011 |
| Sprache | Englisch |
| Identifikator | KITopen-ID: 230082289 |
| HGF-Programm | 43.13.03 (POF II, LK 01) Micro chemical engineering |
| Erscheinungsvermerk | 64th IUVSTA Workshop on Practical Applications and Methods of Gas Dynamics for Vacuum Science and Technology, Leinsweiler, May 16-19, 2011 |