PT Journal
AU Müller, M
   Schimmel, T
   Häußler, P
   Fettig, H
   Müller, O
   Albers, A
TI Finite element analysis of V‐shaped cantilevers for atomic force microscopy under normal and lateral force loads
SO Surface and interface analysis
PY 2006
BP 1090
EP 1095
VL 38
IS 6
DI 10.1002/sia.2321
LA english
ER