PT Journal AU Gerthsen, D Schneider, R Freitag, B Ilin, KS Siegel, M TI Structural, microchemical and superconducting properties of ultrathin NbN films on silicon SO Crystal research and technology PY 2009 BP 1115 EP 1121 VL 44 IS 10 DI 10.1002/crat.200900462 LA english ER