PT Journal AU Doll, PW Al-Ahmad, A Bacher, A Muslija, A Thelen, R Hahn, L Ahrens, R Spindler, B Guber, AE TI Fabrication of silicon nanopillar arrays by electron beam lithography and reactive ion etching for advanced bacterial adhesion studies SO Materials Research Express PY 2019 BP Art. EP Nr.: VL 6 IS 6 DI 10.1088/2053-1591/ab0a16 LA english ER