PT Unknown AU Mätzing, H Baumann, W Paur, HR Seifert, H TI Chemical model of Ar/O₂ microwave plasma with nanoparticle formation from metal precursors SE Proceedings of the 19th International Symposium on Plasma Chemistry (ISPC), Bochum, July 26-31, 2009 PY 2009 LA english PI Bochum, Deutschland ER