PT Unknown
AU Mätzing, H
   Baumann, W
   Paur, HR
   Seifert, H
TI Chemical model of Ar/O₂ microwave plasma with nanoparticle formation from metal precursors
SE Proceedings of the 19th International Symposium on Plasma Chemistry (ISPC), Bochum, July 26-31, 2009
PY 2009
LA english
PI Bochum, Deutschland
ER