PT Journal AU Kempf, S Ferring, A Fleischmann, A Gastaldo, L Enss, C TI Characterization of the reliability and uniformity of an anodization-free fabrication process for high-quality Nb/Al–AlOx/Nb Josephson junctions SO Superconductor science and technology PY 2013 BP Art.Nr.: EP 065012 VL 26 IS 6 DI 10.1088/0953-2048/26/6/065012 LA german ER