PT Journal AU Kempf, S Wegner, M Deeg, L Fleischmann, A Gastaldo, L Herrmann, F Richter, D Enss, C TI Design, fabrication and characterization of a 64 pixel metallic magnetic calorimeter array with integrated, on-chip microwave SQUID multiplexer SO Superconductor science and technology PY 2017 VL 30 IS 6 DI 10.1088/1361-6668/aa6d17 LA english ER