PT Unknown
AU Osipov, AA
   Iankevich, G
   Berezenko, VI
   Speshilova, AB
   Alexandrov, SE
TI ICP etching of SiC with low surface roughness
SE 2019 International Scientific Conference on Materials Science: Composites, Alloys and Materials Chemistry, MS-CAMC, 20-21 November 2020, Saint Petersburg, Russia
PY 2019
BP 512
EP 515
VL 30
DI 10.1016/j.matpr.2020.01.036
LA english
PI Sankt Petersburg, Russland
ER