PT Journal AU Worgull, M Heckele, M Mappes, T Matthis, B Tosello, G Metz, T Gavillet, J Koltay, P Hansen, HN TI Sub μm structured lotus surfaces manufacturing SO Microsystem Technologies PY 2009 BP 1327 EP 33 VL 15 DI 10.1007/s00542-008-0744-7 LA english ER