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Calibration of quartz tuning fork spring constants for non-contact atomic force microscopy: Direct mechanical measurements and simulations

Falter, J.; Stiefermann, M.; Langewisch, G.; Schurig, P.; Hölscher, H.; Fuchs, H.; Schirmeisen, A.

Quartz tuning forks are being increasingly employed as sensors in non-contact atomic force microscopy especially in the “qPlus” design. In this study a new and easily applicable setup has been used to determine the static spring constant at several positions along the prong of the tuning fork. The results show a significant deviation from values calculated with the beam formula. In order to understand this discrepancy the complete sensor set-up has been digitally rebuilt and analyzed by using finite element method simulations. These simulations provide a detailed view of the strain/stress distribution inside the tuning fork. The simulations show quantitative agreement with the beam formula if the beam origin is shifted to the position of zero stress onset inside the tuning fork base and torsional effects are also included. We further found significant discrepancies between experimental calibration values and predictions from the shifted beam formula, which are related to a large variance in tip misalignment during the tuning fork assembling process.

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Verlagsausgabe §
DOI: 10.5445/IR/1000049227
Veröffentlicht am 09.05.2018
DOI: 10.3762/bjnano.5.59
Zitationen: 13
Web of Science
Zitationen: 12
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Institut für Nanotechnologie (INT)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2014
Sprache Englisch
Identifikator ISSN: 2190-4286
KITopen-ID: 1000049227
HGF-Programm 43.13.01 (POF II, LK 01)
Erschienen in Beilstein journal of nanotechnology
Band 5
Heft 1
Seiten 507-516
Schlagwörter atomic force microscopy, calibration, instrumentation
Nachgewiesen in Web of Science
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