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DOI: 10.5445/IR/1000049780

Functional Microstructures via Direct Laser Writing

Quick, Alexander Simon

In the current thesis novel chemical photoresist systems for the fabrication of functional microstructures via three dimensional lithography are described. Next to in-depth characterization of the produced structures, the selected polymerization procedures during curing allowed for covalent postmodification. For the different curing systems, namely for thiol-ene, thiol-yne, and photoenol chemistry, structures were modified in a single, dual, and spatially resolved manner by click chemistry.

Zugehörige Institution(en) am KIT Institut für Technische Chemie und Polymerchemie (ITCP)
Publikationstyp Hochschulschrift
Jahr 2015
Sprache Englisch
Identifikator URN: urn:nbn:de:swb:90-497806
KITopen-ID: 1000049780
Verlag Karlsruhe
Abschlussart Dissertation
Fakultät Fakultät für Chemie und Biowissenschaften (CHEM-BIO)
Institut Institut für Technische Chemie und Polymerchemie (ITCP)
Prüfungsdaten 17.07.2015
Referent/Betreuer Prof. C. Barner-Kowollik
Schlagworte 3D-Lithography, Microstructures, Click Chemistry, Photochemistry
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