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Verlagsausgabe
DOI: 10.5445/IR/1000081469
Veröffentlicht am 29.03.2018
Originalveröffentlichung
DOI: 10.3390/act7010011

Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension

Kirill Poletkin; Jan Korvink

Abstract (englisch):
A micro-machined hybrid contactless suspension, in which a conductive proof mass is inductively levitated within an electrostatic field, is studied. This hybrid suspension has the unique capability to control the stiffness, in particular along the vertical direction, over a wide range, which is limited by a pull-in instability. A prototype of the suspension was micro-fabricated, and the decrease of the vertical component of the stiffness by a factor of 25% was successfully demonstrated. In order to study the pull-in phenomenon of this suspension, an analytical model was developed. Assuming quasi-static behavior of the levitated proof mass, the static and dynamic pull-in of the suspension was comprehensively studied, also yielding a definition for the pull-in parameters of the hybrid suspension.


Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2018
Sprache Englisch
Identifikator ISSN: 2076-0825
URN: urn:nbn:de:swb:90-814699
KITopen-ID: 1000081469
HGF-Programm 43.22.01 (POF III, LK 01)
Erschienen in Actuators
Band 7
Heft 1
Seiten 11
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