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Pull-in actuation in hybrid micro-machined contactless suspension

Poletkin, K. V. 1; Shalati, R. 1; Korvink, J. G. 1; Badilita, V. 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


This paper presents a result of study of the pull-in phenomenon in the hybrid micro-machined contactless suspension (µ-HCS), combining inductive suspension and electrostatic actuation, reported at PowerMEMS 2015 [1]. Assuming the quasi-static behavior of a levitated proof mass, a non-linear analytical model describing the pull-in actuation along the vertical direction is developed. The developed model allows us to predict the static pull-in parameters of the suspension and to show a dependence of these parameters on suspension design. It is shown that the pull-in displacement can be larger by almost a factor of two than one occurring in a spring-mass system with constant stiffness (classic pull-in). The model is verified by using numerical estimations as well as experimental data and agrees well with measurements and calculations.

Verlagsausgabe §
DOI: 10.5445/IR/1000085514
Veröffentlicht am 27.08.2018
DOI: 10.1088/1742-6596/1052/1/012035
Zitationen: 4
Zitationen: 6
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 07.2018
Sprache Englisch
Identifikator ISSN: 1742-6588, 1742-6596
KITopen-ID: 1000085514
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in Journal of physics / Conference Series
Verlag Institute of Physics Publishing Ltd (IOP Publishing Ltd)
Band 1052
Seiten 012035
Bemerkung zur Veröffentlichung 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2017), Kanazawa, J, November 14-17, 2017
Vorab online veröffentlicht am 26.07.2018
Nachgewiesen in Scopus
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