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Pull-in actuation in hybrid micro-machined contactless suspension

Poletkin, K.V.; Shalati, R.; Korvink, J. G.; Badilita, V.

This paper presents a result of study of the pull-in phenomenon in the hybrid micro-machined contactless suspension (µ-HCS), combining inductive suspension and electrostatic actuation, reported at PowerMEMS 2015 [1]. Assuming the quasi-static behavior of a levitated proof mass, a non-linear analytical model describing the pull-in actuation along the vertical direction is developed. The developed model allows us to predict the static pull-in parameters of the suspension and to show a dependence of these parameters on suspension design. It is shown that the pull-in displacement can be larger by almost a factor of two than one occurring in a spring-mass system with constant stiffness (classic pull-in). The model is verified by using numerical estimations as well as experimental data and agrees well with measurements and calculations.

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Verlagsausgabe §
DOI: 10.5445/IR/1000085514
Veröffentlicht am 27.08.2018
DOI: 10.1088/1742-6596/1052/1/012035
Zitationen: 1
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2018
Sprache Englisch
Identifikator ISSN: 1742-6588, 1742-6596
KITopen-ID: 1000085514
HGF-Programm 43.22.01 (POF III, LK 01)
Erschienen in Journal of physics / Conference Series
Band 1052
Seiten 012035
Bemerkung zur Veröffentlichung 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2017), Kanazawa, J, November 14-17, 2017
Vorab online veröffentlicht am 26.07.2018
Nachgewiesen in Scopus
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