The challenging demands of pulsed electron beam devices (such as the GESA device) with respect to their pulsed power supply have led to the development of a new semiconductor-based Marx generator. At a maximum output voltage of 120 kV and 600-A pulse current for a duration of up to 100 μS, stepwise arbitrary output waveforms are desired. A fast rise time of the generator is achieved by using fast switching circuitry, low inductance capacitors, and a low inductance stage arrangement. For low jitter triggering of all stages and efficient signal transmission, the generator uses an optical bus system for communication. Due to the inherent dynamic load characteristics of the GESA device, the generator features a fast overcurrent protection scheme. This paper presents selected design aspects of the generator and their validation in a small-scale assembly able of delivering up to 8 kV at 600-A load current.