Beam broadening measured in transmission mode at low electron energies in a scanning electron microscope
Hugenschmidt, Milena
; Müller, Erich
; Gerthsen, Dagmar
; Müller, Erich
; Gerthsen, DagmarAbstract (englisch):
The broadening of the electron beam in the sample has to be considered when performing scanning transmission electron microscopy (STEM) at low primary electron energies. This work presents direct measurements of the beam broadening in a range of materials. The experimental results are compared with the theoretical model by Gauvin and Rudinsky that uses the concept of anomalous diffusion to obtain an analytical equation for the beam broadening.
| Zugehörige Institution(en) am KIT | Laboratorium für Elektronenmikroskopie (LEM) Universität Karlsruhe (TH) – Zentrale Einrichtungen (Zentrale Einrichtungen) |
| Publikationstyp | Poster |
| Publikationsdatum | 04.09.2019 |
| Sprache | Englisch |
| Identifikator | KITopen-ID: 1000123912 |
| Veranstaltung | Microscopy Conference (MC 2019), Berlin, Deutschland, 01.09.2019 – 05.09.2019 |
| Projektinformation | EXC 2082; 3DMM2O (DFG, DFG EXSTRAT, EXC 2082/1, zu FOR_APH_20_03_25+08-58-20) |
| Schlagwörter | Electron beam broadening, Low-energy STEM, LVSTEM, Scanning transmission electron microscopy, STEM-in-SEM, TSEM. |
| Relationen in KITopen |