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Beam broadening measured in transmission mode at low electron energies in a scanning electron microscope

Hugenschmidt, Milena ORCID iD icon; Müller, Erich ORCID iD icon; Gerthsen, Dagmar

Abstract (englisch):

The broadening of the electron beam in the sample has to be considered when performing scanning transmission electron microscopy (STEM) at low primary electron energies. This work presents direct measurements of the beam broadening in a range of materials. The experimental results are compared with the theoretical model by Gauvin and Rudinsky that uses the concept of anomalous diffusion to obtain an analytical equation for the beam broadening.

Volltext §
DOI: 10.5445/IR/1000123912
Veröffentlicht am 23.09.2020
Cover der Publikation
Zugehörige Institution(en) am KIT Laboratorium für Elektronenmikroskopie (LEM)
Universität Karlsruhe (TH) – Zentrale Einrichtungen (Zentrale Einrichtungen)
Publikationstyp Poster
Publikationsdatum 04.09.2019
Sprache Englisch
Identifikator KITopen-ID: 1000123912
Veranstaltung Microscopy Conference (MC 2019), Berlin, Deutschland, 01.09.2019 – 05.09.2019
Projektinformation EXC 2082; 3DMM2O (DFG, DFG EXSTRAT, EXC 2082/1, zu FOR_APH_20_03_25+08-58-20)
Schlagwörter Electron beam broadening, Low-energy STEM, LVSTEM, Scanning transmission electron microscopy, STEM-in-SEM, TSEM.
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