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Characterization of Mueller matrices in retroreflexellipsometry

Chen, Chia-Wei

Abstract (englisch):
Ellipsometry is a widely-used technique for characterizing materials and thinfilms. The principle is based on the polarization changes after light is reflectedor transmitted at a sample. In general, the shape of the sample should be flat ornearly flat because ellipsometry is sensitive to the angle of incidence, tilt angleand the sample position (height variation). For nonplanar surfaces, retroreflexellipsometry was proposed to solve the problem of the alignment. Despite ofthe Mueller matrix, the coherency matrix is often used for depolarization andnoise reduction. In retroreflex ellipsometry, the measured Mueller matrix can beseen as a dual-rotation transformation. Therefore, it is important to discuss thechanges of reference frames for Mueller matrices. In this report, the polarizationmodel of retroreflex ellipsometry will be introduced. Decompositions andinvariant quantities of a Mueller matrix with a dual-rotation transformation willbe discussed.

Verlagsausgabe §
DOI: 10.5445/IR/1000135071
Veröffentlicht am 06.07.2021
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Anthropomatik und Robotik (IAR)
Publikationstyp Proceedingsbeitrag
Publikationsjahr 2021
Sprache Englisch
Identifikator ISBN: 978-3-7315-1091-8
KITopen-ID: 1000135071
Erschienen in Proceedings of the 2020 Joint Workshop of Fraunhofer IOSB and Institute for Anthropomatics, Vision and Fusion Laboratory. Ed.: J. Beyerer; T. Zander
Verlag KIT Scientific Publishing
Seiten 19-32
Serie Karlsruher Schriften zur Anthropomatik / Lehrstuhl für Interaktive Echtzeitsysteme, Karlsruher Institut für Technologie ; Fraunhofer-Inst. für Optronik, Systemtechnik und Bildauswertung IOSB Karlsruhe ; 51
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