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Scanning Transmission Electron Microscopy in a Scanning Electron Microscope: Electron-Beam Broadening, Contamination, and Investigation of ZIF-8 by Correlative Electron Microscopy

Hugenschmidt, Milena ORCID iD icon 1,2
1 Laboratorium für Elektronenmikroskopie (LEM), Karlsruher Institut für Technologie (KIT)
2 3D Matter Made to Order (3DMM2O), Karlsruher Institut für Technologie (KIT)

Abstract (englisch):

Scanning transmission electron microscopy (STEM) at low electron energies in scanning electron microscopes has several advantages: The lower energies (typically ≤ 30 keV) in scanning electron microscopy (SEM) compared to the commonly used energies of 80 keV - 300 keV in STEM imaging yield enhanced contrast for light materials and reduced knock-on damage. The many detectors in a scanning electron microscope enable correlative imaging of surface and bulk properties of the same specimen regions. Scanning electron microscopes are also more readily available in research laboratories due to the lower price compared to classical STEM instruments. Hence, STEM in scanning electron microscopes, abbreviated as STEM-in-SEM, is a viable alternative to high-energy STEM in dedicated STEM instruments for analyses down to the nanometer scale. However, some characteristics of STEM-in-SEM, like contamination and electron-beam broadening in specimens, are more severe at lower electron energies. Both of these issues are quantitatively analyzed in this work.
Another part of this thesis is concerned with studying the surface-mounted metal-organic framework (SURMOF) ZIF-8 by STEM and transmission electron microscopy (TEM) at electron energies of 200 keV and 300 keV. ... mehr


Volltext §
DOI: 10.5445/IR/1000144435
Veröffentlicht am 05.04.2022
Cover der Publikation
Zugehörige Institution(en) am KIT 3D Matter Made to Order (3DMM2O)
Laboratorium für Elektronenmikroskopie (LEM)
Publikationstyp Hochschulschrift
Publikationsdatum 05.04.2022
Sprache Englisch
Identifikator KITopen-ID: 1000144435
Verlag Karlsruher Institut für Technologie (KIT)
Umfang xiv, 196 S.
Art der Arbeit Dissertation
Fakultät Fakultät für Physik (PHYSIK)
Institut Laboratorium für Elektronenmikroskopie (LEM)
Prüfungsdatum 04.02.2022
Schlagwörter electron microscopy, chemical composition analysis, high spatial resolution, layer-by-layer growth, surface-anchored metal–organic frameworks, zeolitic imidazolate framework-8, electron beam broadening, scanning transmission electron microscopy, carbon contamination, quantitative thickness measurement, STEM at low electron energies, STEM-in-SEM, TSEM, sample cleaning, surface diffusion
Relationen in KITopen
Referent/Betreuer Gerthsen, Dagmar
Kleebe, Hans-Joachim
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft
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