KIT | KIT-Bibliothek | Impressum | Datenschutz

Control of a SiC 2.5 MHz resonant full-bridge inverter for inductively driven plasma

Simon, C.; Eizaguirre, S.; Denk, Fabian; Heidinger, M.; Kling, R.; Heering, W.

Abstract (englisch):

The electronic ballast of an inductively driven plasma faces a mostly inductive, variable load impedance. The SiC full-bridge inverter uses the inductive behavior to achieve zero-voltage-switching and a switching frequency of 2.5 MHz, at 3.9 kVA and 764W in the plasma. The control is realized on a modern, small TI Piccolo microcontroller with a high-resolution PWM module and compensates for the variable load impedance. We present design and experimental results of a 2.5 MHz inverter for inductively driven plasma without the need for a large FPGA controller.


Postprint §
DOI: 10.5445/IR/1000144776
Veröffentlicht am 05.07.2022
Cover der Publikation
Zugehörige Institution(en) am KIT Lichttechnisches Institut (LTI)
Publikationstyp Proceedingsbeitrag
Publikationsmonat/-jahr 05.2019
Sprache Englisch
Identifikator ISBN: 978-3-8007-4938-6
KITopen-ID: 1000144776
Erschienen in PCIM Europe 2019; International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management
Veranstaltung PCIM Europe 2019 : International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management (2019), Nürnberg, Deutschland, 07.05.2019 – 09.05.2019
Verlag VDE Verlag
Seiten 1753-1760
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft
KITopen Landing Page