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Characteristics and ultra-high total ionizing dose response of 22 nm fully depleted silicon-on-insulator

Termo, Gennaro; Borghello, Giulio; Faccio, Federico; Kloukinas, Kostas; Caselle, Michele 1; Elsenhans, Alexander Friedrich 1; Ulusoy, Ahmet Çağri 2; Koukab, Adil; Sallese, Jean-Michel
1 Institut für Prozessdatenverarbeitung und Elektronik (IPE), Karlsruher Institut für Technologie (KIT)
2 Institut für Hochfrequenztechnik und Elektronik (IHE), Karlsruher Institut für Technologie (KIT)

Abstract:

The radiation response of MOS transistors in a 22 nm Fully Depleted Silicon-On-Insulator (FDSOI) technology exposed to ultra-high total ionizing dose (TID) was investigated. Custom structures including n- and p-channel devices with different sizes and threshold voltage flavours were irradiated with X-rays up to a TID of 100 Mrad(SiO$_2$) with different back-gate bias configurations, from -8 V to 2 V. The investigation revealed that the performance is significantly affected by TID, with the radiation response being dominated by the charge trapped in the buried oxide.


Verlagsausgabe §
DOI: 10.5445/IR/1000170013
Veröffentlicht am 18.04.2024
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Hochfrequenztechnik und Elektronik (IHE)
Institut für Prozessdatenverarbeitung und Elektronik (IPE)
Publikationstyp Zeitschriftenaufsatz
Publikationsdatum 19.03.2024
Sprache Englisch
Identifikator ISSN: 1748-0221
KITopen-ID: 1000170013
Erschienen in Journal of Instrumentation
Verlag Institute of Physics Publishing Ltd (IOP Publishing Ltd)
Band 19
Heft 03
Seiten Art.-Nr.: C03039
Schlagwörter Inspection with x-rays, Radiation damage to electronic components, Radiation-hard electronics
Nachgewiesen in Scopus
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