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A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

Meier, T.; Förste, A.; Tavassolizadeh, A.; Rott, K.; Meyners, D.; Gröger, R.; Reiss, G.; Quandt, E.; Schimmel, T.; Hölscher, H.

We describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 × 5 μm$^{3}$ is mounted on a large-area scanner with a scan range of 800 × 800 × 35 μm$^{3}$. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection setup to measure the deflection of the cantilevers independently. The instrument is based on a commercial AFM controller and capable to perform large-area scanning directly without stitching of images. Images obtained on different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.

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DOI: 10.5445/IR/110099995
DOI: 10.3762/bjnano.6.46
Zitationen: 5
Web of Science
Zitationen: 5
Zugehörige Institution(en) am KIT Institut für Angewandte Physik (APH)
Institut für Mikrostrukturtechnik (IMT)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Jahr 2015
Sprache Englisch
Identifikator ISSN: 2190-4286
KITopen-ID: 110099995
HGF-Programm 43.22.01 (POF III, LK 01)
Erschienen in Beilstein journal of nanotechnology
Band 6
Seiten 451-461
Bemerkung zur Veröffentlichung CCby Lizenz 2.0
Schlagworte atomic force microscopy (AFM), magnetomechanical effects, magnetostriction, scanning probe microscopes and components
Nachgewiesen in Web of Science
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