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A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

Meier, T. 1; Förste, A. 2; Tavassolizadeh, A.; Rott, K.; Meyners, D.; Gröger, R. 2; Reiss, G.; Quandt, E.; Schimmel, T. 2,3; Hölscher, H. 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)
2 Institut für Nanotechnologie (INT), Karlsruher Institut für Technologie (KIT)
3 Institut für Angewandte Physik (APH), Karlsruher Institut für Technologie (KIT)


We describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 × 5 μm$^{3}$ is mounted on a large-area scanner with a scan range of 800 × 800 × 35 μm$^{3}$. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection setup to measure the deflection of the cantilevers independently. The instrument is based on a commercial AFM controller and capable to perform large-area scanning directly without stitching of images. Images obtained on different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.

Volltext §
DOI: 10.5445/IR/110099995
DOI: 10.3762/bjnano.6.46
Zitationen: 7
Web of Science
Zitationen: 6
Zitationen: 5
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Angewandte Physik (APH)
Institut für Mikrostrukturtechnik (IMT)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2015
Sprache Englisch
Identifikator ISSN: 2190-4286
KITopen-ID: 110099995
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in Beilstein journal of nanotechnology
Verlag Beilstein-Institut
Band 6
Seiten 451-461
Bemerkung zur Veröffentlichung CCby Lizenz 2.0
Schlagwörter atomic force microscopy (AFM), magnetomechanical effects, magnetostriction, scanning probe microscopes and components
Nachgewiesen in Dimensions
Web of Science
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